Aixtron G4-TM for GaAs
Aixtron G4-TM for GaAs是德国 AIXTRON SE 推出的 金属有机化学气相沉积（MOCVD）系统，属于 G4（第四代）平台，专为 GaAs / InP 及其他 III-V 化合物半导体材料的高质量外延生长 而设计。该系统广泛用于高性能光电子器件与射频器件的制造
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