Aixtron G4-HT for SiC
AIXTRON G4-HT（High-Temperature）是一款由德国 AIXTRON SE 开发的高温金属有机化学气相沉积（MOCVD）系统，主要用于半导体材料的外延生长与薄膜沉积。此类设备传统上用于制作 III-V 化合物材料（如 GaN 等），用于包括碳化硅（SiC）相关材料的沉积工艺中。
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| color | Yellow |
|---|---|
| size | Large, Medium, Small |
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