Novellus C2
Novellus C2 PECVD 是 Applied Materials（阿普莱德材料）旗下 Novellus 系列的 PECVD 外延沉积设备。它采用 等离子体增强化学气相沉积（PECVD）技术，用于在晶圆表面沉积薄膜材料，广泛应用于 集成电路制造、功率器件、光电子与 MEMS 等领域。
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| Weight | 0.5 kg |
|---|---|
| Dimensions | 10 × 12 × 0.5 cm |
| color | Yellow |
| size | Large, Medium, Small |
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